Study of the Effect of Radiation Exposure on Grain Size and Mechanical Properties of Thin-Film Aluminum

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For the first time, an experimental dependence of the grain size and mechanical properties of a thin-film aluminum material on the dose of short-wave radiation has been obtained. A thin film of aluminum was formed on a silicon substrate using magnetron sputtering. The effect of a decrease in mechanical strength and biaxial elastic modulus with increasing radiation dose was identified. This effect is explained by a decrease in grain size and roughness on a thin-film aluminum membrane. For the microscopically measured range of aluminum grain sizes, the inverse Hall-Petch relation is used. During the research, it was determined that during irradiation the number of grain boundaries and the number of grains themselves increases, which leads to an increase in the likelihood of deformation.

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作者简介

N. Dyuzhev

National Research University of Electronic Technology (MIET)

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Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498

E. Gusev

National Research University of Electronic Technology (MIET)

Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498

E. Portnova

National Research University of Electronic Technology (MIET)

Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498

M. Makhiboroda

National Research University of Electronic Technology (MIET)

Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498

参考

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2. Fig. 1. Technological route

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3. Fig. 2. Image of the fabricated crystals

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4. Fig. 3. Depiction of the membrane in the side view

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5. Fig. 4. Dependence of mechanical strength on irradiation dose, where the triangle denotes literature data and the rhombuses denote data obtained during experiments for this work. On the x-axis - D - irradiation dose measured in Mrad, on the y-axis - σ - mechanical strength measured in GPa

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6. Fig. 5. Dependence of the biaxial modulus of elasticity on the irradiation dose, where the triangle denotes the literature data and the squares denote the data obtained during the experiments for this work. On the x-axis - D - irradiation dose measured in Mrad, on the y-axis - E/(1-μ) - biaxial elastic modulus measured in GPa

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7. Fig. 6. Grain size analysis: (a) - SEM photograph; (b) - analysis result for 0 Mrad dose

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8. Fig. 7. Dependence of grain size and roughness on irradiation dose. On the x-axis - D - irradiation dose measured in Mrad, on the main axis y - S - grain size measured in nanometres on the auxiliary axis y - Ra - surface roughness measured in nanometres

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9. Fig. 8. Change in the number of intergrain boundaries: (a) - before irradiation; (b) - after irradiation

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