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Study of Reflectivity and Microstructure of Mo/Be Multilayer Mirrors
- Authors: Antysheva G.D.1,2, Kumar N.1, Pleshkov R.S.1, Yunin P.A.1,2, Polkovnikov V.N.1, Chkhalo N.I.1
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Affiliations:
- Institute for Physics of Microstructures RAS
- Lobachevsky State University of Nizhny Novgorod
- Issue: No 12 (2023)
- Pages: 3-6
- Section: Articles
- URL: https://clinpractice.ru/1028-0960/article/view/664694
- DOI: https://doi.org/10.31857/S1028096023120026
- EDN: https://elibrary.ru/AXEXHB
- ID: 664694
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Abstract
The reflection coefficient and microstructure of Mo/Be multilayer mirrors were studied as functions of Γ, the ratio of the Mo layer thickness to the period dp. The thickness and period of the layers were studied using X‑ray diffraction (wavelength 0.154 nm). Clearly defined high-intensity Bragg reflection peaks indicate good reproducibility of layer thicknesses over the depth of the multilayer structure and high quality of interfaces. The reflectivity of the mirror at a wavelength of 11.4 nm was maximum 62% at Γ = 0.42. It sharply decreased at higher and lower values of Γ. Both Mo and Be layers at Γ = 0.42 were polycrystals, which were studied using X-ray diffraction and Raman spectroscopy, respectively. It was also found that the sizes of crystallites almost coincided with the thicknesses of the Be and Mo layers in the period.
About the authors
G. D. Antysheva
Institute for Physics of Microstructures RAS; Lobachevsky State University of Nizhny Novgorod
Author for correspondence.
Email: sikretnoo@mail.ru
Russia, 603087, Afonino, ,; Russia, 603950, Nizhny Novgorod
N. Kumar
Institute for Physics of Microstructures RAS
Author for correspondence.
Email: kumar@ipmras.ru
Russia, 603087, Afonino, ,
R. S. Pleshkov
Institute for Physics of Microstructures RAS
Email: kumar@ipmras.ru
Russia, 603087, Afonino, ,
P. A. Yunin
Institute for Physics of Microstructures RAS; Lobachevsky State University of Nizhny Novgorod
Email: kumar@ipmras.ru
Russia, 603087, Afonino, ,; Russia, 603950, Nizhny Novgorod
V. N. Polkovnikov
Institute for Physics of Microstructures RAS
Email: kumar@ipmras.ru
Russia, 603087, Afonino, ,
N. I. Chkhalo
Institute for Physics of Microstructures RAS
Email: kumar@ipmras.ru
Russia, 603087, Afonino, ,
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